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In this work we present a miniaturized electronic nose (E-Nose) sensor platform made by integrating film bulk acoustic resonators (FBARs) with arrays of CMOS oscillators. Each of the FBARs in the array is chemically activated to differing vapors (odors) after depositing a variety of polymers on the active areas of the resonators. To simulate the detection of primary indoor pollutants, we present the...
Although digital microfluidic system has shown great potential in a wide range of applications, a single-chip platform integrating biochemical sensors with digital microfluidic devices is still lacking. In this paper, film bulk acoustic resonator (FBAR) sensors and electrowetting-on-dielectric (EWOD) actuator are integrated on a single silicon chip, where the EWOD actuator manipulates digital droplets...
Film bulk acoustic resonator (FBAR) mass sensor has been widely explored for detection of chemical and biological events. In this paper, an FBAR sensor bounded by hydrophobic Teflon film has been fabricated and tested. Experimental results in Hg2+ detection demonstrate that the Teflon film bordering around the sensor enhances signal of the sensor by at least an order of magnitude. The improved FBAR...
A recent acoustic MEMS transducer, a mass sensor based on FBAR (film bulk acoustic resonator), is shown to detect addition of a single DNA base. As the FBAR sensor can detect minute amount of DNA (and/or RNA) markers without the need for optical imaging, it will enable us to develop an “easy to use” and reliable system to detect the presence of pathogen's nucleic acids in non-invasive fluids, such...
The mass resolution of the sensor based on a film bulk acoustic resonator (FBAR) needs to be improved when it is used to detect small molecules with low concentration. A method to improve the mass resolution of FBAR by active control technology is proposed. The active control function is realized by introducing an active control piezoelectric layer between the sensing piezoelectric layer and the substrate...
A mass sensor based on thin film bulk acoustic resonator (FBAR) is submitted in this paper. This sensor is fabricated by standard MEMS process as back-etch structure and its resonator curve is measured by Agilent Vector network analyer. The results show that this sensor's Q factor is above 610 and resonance frequency is about 1608 MHz. This FBAR sensor is applied as humidity sensor. The reproducibility...
This paper reports experimental results on the selectivity and long-term reliability of the explosive-vapor-trace detection based on antigen-antibody binding on a film bulk acoustic resonator (FBAR). An FBAR coated with specific antibody was shown to be able to detect vapor trace of TNT (Trinitrotoluene) or RDX (Cyclotrimethylenetrinitramine) without any pre-concentrator [1], but its false alarm rate...
The following topics are dealt with: frequency synthesis; optical lattice clock; device and material characterization methods; FBAR and EMAT sensors; frequency control components; timing and clocks; resonant sensors; electronic circuit manufacturing; physical sensors; miniature oscillators; single ion optical clocks; SAW biosensors; voltage controlled oscillators; miniature devices; optical components;...
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